International Research Center "Piezo- and Magnetoelectric Materials"

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Research Center "Physical Materials Science and Composite Materials"
We create materials for the future
What are we doing
The scientific work of the international research center is aimed at developing new smart materials for various industries, primarily for biomedical purposes, renewable energy and new generation flexible electronics. The developments of the Biomedical Center ensure the transfer of technologies, which, in particular, contribute to the transition to personalized medicine, high-tech healthcare and health-saving technologies.
News
Our channel
Study of new principles of construction (design) of materials with predetermined properties (for example, the flexoelectric effect; the effect of structural defects on the electromechanical and electrophysical characteristics of piezomaterials, etc.)
(Lecture by the director of the scientific center - Surmenev Roman Anatolyevich)
We are in the media
Development and research of new types of biocompatible materials and coatings to replace or restore damaged tissues
(Lecture by the curator - Maria Kozadayeva)
Smart Composite Materials for Nervous Tissue Regeneration
(Lecture by the curator - Shlapakova L.E.)
Research interests
The Team teachable
Head of direction - Chernozem Roman Viktorovich
Head of direction - Maria Kozadayeva
Head of direction - Shlapakova Lada Evgenievna
Head of direction - Dmitry Khrapov
Head of direction - Grubova Irina Yurievna
Team(Researchers)
  • Kholkin Andrey Leonidovich
    Candidate of Physical and Mathematical Sciences(PhD), Professor, Director

    kholkin@ua.pt

  • Surmenev Roman Anatolievich
    Doctor of Technical Sciences, Professor, Director

    rsurmenev@mail.ru

  • Surmeneva Maria Alexandrovna
    Candidate of Physical and Mathematical Sciences, Associate Professor, Leading Researcher

    surmenevamaria@mail.ru
  • Chernozem Roman Viktorovich
    PhD, Associate Professor

    romanchernozem@gmail.com
    rvc1@tpu.ru
  • Grubova Irina Yurievna, Associate Professor, Leading Researcher
    PhD, Leading Researcher

    rodeo_88@mail.ru
  • Vladescu Alina
    PhD, Senior Researcher

    vladesku@tpu.ru
  • Mukhortova Yulia Ruslanovna
    Researcher, chemist-technologist

    phenics100@gmail.com
  • Chernozem Polina Viktorovna
    PhD student, engineer-researcher

    polinachernozem@gmail.com
  • Pryadko Artyom
    PhD student, engineer-researcher

    vilajer@gmail.com
  • Kozadayeva Maria
    PhD student, engineer

    mariakoz71@gmail.com
  • Khrapov Dmitriy
    PhD student, research engineer

    cheshirskyvolk@mail.ru
  • Shlapakova Lada Evgenievna
    PhD student, research engineer

    les2@tpu.ru
  • Abdullah Bin Firoz
    PhD student, engineer

    er.abdullahbinfiroz@gmail.com
  • Romanyuk Konstantin Nikolaevich
    PhD, engineer

    kn.romanyuk@mail.ru
  • Glukhova Natalya Sergeevna
    PhD student, Leading Engineer

    mona@tpu.ru
  • Sharonova Anna Alexandrovna
    PhD student, researcher

    anek764@yandex.ru
  • Gubaidullin Nail Evgenievich
    Engineer

    artika@tpu.ru
  • Zhuravlev Oleg Borisovich
    Engineer

    obzhuravlev@tpu.ru
  • Rybakov Vladimir Andreevich
    PhD student, engineer

    8426852@mail.ru
  • Chudinova Ekaterina Aleksandrovna
    PhD student, research engineer

    e_chudinova93@mail.ru
Team(Students)
  • Fetisova Anastasia Alekseevna
    Master, engineer

    zerospace25@gmail.com
  • Koptsev Danila Andreevich
    Bachelor, laboratory assistant

    danilakoptcev@yandex.ru
  • Urakova Alina Olegovna
    Master, engineer

    urakowa.alina@yandex.ru
  • Baksheev Artyom Igorevich
    Bachelor, laboratory Assistant

    artem27cc@gmail.com
  • Galstenkova Maria Romanovna
    Master, engineer

    galstenkova@mail.ru
  • Anorin Vitaliy Evgenievich
    Bachelor, laboratory Assistant

    vea7@tpu.ru
  • Dabaeva Dolsanma Sayanovna.
    Bachelor, laboratory assistant
    dsd12@tpu.ru
Publications
We work hard every day to make people's lives even better
This is the first comprehensive study of the impact of biodegradation on the structure, surface potential, mechanical and piezoelectric properties of poly(3-hydroxybutyrate) (PHB) scaffolds supplemented with reduced graphene oxide (rGO) as well as cell behavior under static and dynamic mechanical conditions. There is no effect of the rGO addition up to 1.0 wt% on the rate of enzymatic biodegradation of PHB scaffolds for 30 d. The biodegradation of scaffolds leads to the depolymerization of the amorphous phase, resulting in an increase in the degree of crystallinity. Because of more regular dipole order in the crystalline phase, surface potential of all fibers increases after the biodegradation, with a maximum (361 ± 5 mV) after the addition of 1 wt% rGO into PHB as compared to pristine PHB fibers. By contrast, PHB-0.7rGO fibers manifest the strongest effective vertical (0.59 ± 0.03 pm V−1) and lateral (1.06 ± 0.02 pm V−1) piezoresponse owing to a greater presence of electroactive β-phase. In vitro assays involving primary human fibroblasts reveal equal biocompatibility and faster cell proliferation on PHB-0.7rGO scaffolds compared to pure PHB and nonpiezoelectric polycaprolactone scaffolds. Thus, the developed biodegradable PHB-rGO scaffolds with enhanced piezoresponse are promising for tissue-engineering applications.
Magnetoelectric (ME) small-scale robotic devices attract great interest from the scientific community due to their unique properties for biomedical applications. Here, novel ME nano hetero-structures based on the biocompatible magnetostrictive MnFe2O4 (MFO) and ferroelectric Ba0.85Ca0.15Zr0.1Ti0.9O3 (BCZT) are developed solely via the hydrothermal method for the first time. An increase in the temperature and duration of the hydrothermal synthesis results in increasing the size, improving the purity, and inducing morphology changes of MFO nanoparticles (NPs). A successful formation of a thin epitaxial BCZT-shell with a 2–5 nm thickness is confirmed on the MFO NPs (77 ± 14 nm) preliminarily treated with oleic acid (OA) or polyvinylpyrrolidone (PVP), whereas no shell is revealed on the surface of pristine MFO NPs. High magnetization is revealed for the developed ME NPs based on PVP- and OA-functionalized MFO NPs (18.68 ± 0.13 and 20.74 ± 0.22 emu g−1, respectively). Moreover, ME NPs demonstrate 95% degradation of a model pollutant Rhodamine B within 2.5 h under an external AC magnetic field (150 mT, 100 Hz). Thus, the developed biocompatible core–shell ME NPs of MFO and BCZT can be considered as a promising tool for non-invasive biomedical applications, environmental remediation, and hydrogen generation for renewable energy sources.
Functionally graded porous scaffolds (FGPS) constructed with pores of different size arranged as spatially continuous structure based on sheet-based gyroid with three different scaling factors of 0.05, 0.1 and 0.2 were produced by electron beam powder bed fusion. The pore dimensions of the obtained scaffolds satisfy the values required for optimal bone tissue ingrowth. Agglomerates of residual powder were found inside all structures, which required post-manufacturing treatment. Using X-ray Computed Tomography powder agglomerations were visualized and average wall thickness, wall-to-wall distances, micro- and macro-porosities were evaluated. The initial cleaning by powder recovery system (PRS) was insufficient for complete powder removal. Additional treatment by dry ultrasonic vibration (USV) was applied and was found successful for gyroids with the scaling factors of 0.05 and 0.1. Mechanical properties of the samples, including quasi-elastic gradients and first maximum compressive strengths of the structures before and after USV were evaluated to prove that additional treatment does not produce structural damage. The estimated quasi-elastic gradients for gyroids with different scaling factors lie in a range between 2.5 and 2.9 GPa, while the first maximum compressive strength vary from 52.5 for to 59.8 MPa, compressive offset stress vary from 46.2 for to 53.2 MPa.
The results of comprehensive research on the thermal behavior and molecular and crystalline structures of poly(3-hydroxybutyrate) (PHB) and poly(3-hydroxybutyrate-co-3-hydroxyvalerate) (PHB-HV) films of different thicknesses, their molecular weights (Mw) and 3-hydroxyvalerate (3-HV) contents are reported. Increasing film thickness from 30 to 100 µm resulted in an isotropic crystal orientation, reducing the crystallite size of the orthorhombic α-phase in the b direction from 22 to 17 nm and increasing the degree of crystallinity of the PHB films without affecting their thermal behavior. Furthermore, despite resulting in the same degree of crystallinity and roughness, an ~8-fold decrease in PHB Mw from 803 kDa to 102 kDa resulted in a decreased number of piezoactive domains. The addition of 5.9% 3-HV resulted in anisotropy in the PHB crystalline structure and increased D(020) from 19 nm to 24 nm. Additionally, a further increase in the 3-HV content to 17.5% in the PHB-HV films led to a decrease in the melting temperature and a decrease in the degree of crystallinity from 57% to 23%, which resulted in the absence of local piezoresponse. Notably, the decrease in the Mw of PHB-HV (~17%) from 1177 kDa to 756 kDa resulted in an increase in the degree of crystallinity from 23% to 32%. Moreover, the PHB-HV films became smoother with increasing 3-HV content.


The research community is in permanent search of novel materials and exploitation of already elaborated phenomena to reveal yet unknown materials characteristics. Flexoelectricity has been in the spotlight lately because of its unique capacity to modulate electrical, optoelectronic, photovoltaic, and related properties and other characteristics of materials and devices. Nonetheless, potential limits on further progress of materials performance owing to incomplete knowledge about this effect are still not investigated to a sufficient extent. This review is focused on the most recent achievements on flexoelectric materials and on strain engineering strategies for modulating a strain gradient and flexoelectric response, with an emphasis on photovoltaic and related applications. Photodetectors based on flexoelectric materials and structures are discussed, and a brief overview of alternative (nonphotovoltaic) and emerging applications and challenges is provided. It is suggested that the most important materials for photovoltaic and related applications range from low-dimensional and thin-film ferroelectric semiconductors (which for example can be designed in an alternative way, according to the “barrier layer capacitor” principle) to conducting materials that are not restricted by the Shockley–Queisser limit. Such materials enable ultrafast charge carrier separation and enhanced photocurrents, photovoltages, and other photoelectric parameters of devices under strain gradients, compared with available analogs.
Pre-alloyed β-phase Ti˗42Nb alloy was successfully produced for the first time by E-PBF. The study focuses on the determination of the processing parameter window by varying the beam current, beam speed, layer thickness, and line offset to achieve the defect-free manufacturing of new material with desired properties. Overall, 49 regimes were investigated. The Ti˗42Nb powder were characterized using the DSC/TG, XRD, and SEM/EDX analyses to evaluate its suitability for E-PBF manufacturing. The alloys with the best-built quality fall into the narrow zone between the line energies of 0.30 and 0.34 J/mm. The predicted optimal process parameters were I=4 mA, v=700–800 mm/s, h=100 μm, U=60 kV, and t=100 μm. Detailed microstructural characterization was carried out to gain insights into the fundamental mechanisms that govern the behavior of the studied alloys. TEM identified the α'' martensitic phase nucleation occurred preferentially at the β grain boundaries. Un-melted ellipsoidal NbC (∼10 μm) particles were detected with no preferential segregation sites. EBSD revealed coarse microstructures and <001> fiber texture, as well as epitaxial grain growth of columnar grains of about 300 μm. The optimal regime demonstrated a texture composed of a high amount of low aspect ratio grains (50%), which yielded a microindentation hardness of 3.0 GPa and a low elastic modulus of 68 GPa. Hence, these results provide opportunities to design novel alloys to be of interest for biomedical applications. Moreover, this study extends the scope of AM by establishing the process parameter window that yields a material with favorable mechanical properties.
This study considers a fabrication of magnetoactive scaffolds based on a copolymer of vinylidene fluoride and trifluoroethylene (P(VDF-TrFE)) and 5, 10, and 15 wt.% of magnetite (Fe3O4) nanoparticles modified with citric (CA) and oleic (OA) acids by solution electrospinning. The synthesized Fe3O4-CA and Fe3O4-OA nanoparticles are similar in particle size and phase composition, but differ in zeta potential values and magnetic properties. Pure P(VDF-TrFE) scaffolds as well as composites with Fe3O4-CA and Fe3O4-OA nanoparticles demonstrate beads-free 1 μm fibers. According to scanning electron (SEM) and transmission electron (TEM) microscopy, fabricated P(VDF-TrFE) scaffolds filled with CA-modified Fe3O4 nanoparticles have a more homogeneous distribution of magnetic filler due to both the high stabilization ability of CA molecules and the affinity of Fe3O4-CA nanoparticles to the solvent used and P(VDF-TrFE) functional groups. The phase composition of pure and composite scaffolds includes a predominant piezoelectric β-phase, and a γ-phase, to a lesser extent. When adding Fe3O4-CA and Fe3O4-OA nanoparticles, there was no significant decrease in the degree of crystallinity of the P(VDF-TrFE), which, on the contrary, increased up to 76% in the case of composite scaffolds loaded with 15 wt.% of the magnetic fillers. Magnetic properties, mainly saturation magnetization (Ms), are in a good agreement with the content of Fe3O4 nanoparticles and show, among the known magnetoactive PVDF or P(VDF-TrFE) scaffolds, the highest Ms value, equal to 10.0 emu/g in the case of P(VDF-TrFE) composite with 15 wt.% of Fe3O4-CA nanoparticles.
The β-type Ti-42Nb alloy has been successfully manufactured from pre-alloyed powder using the E-PBF method for the first time. This study presents thorough microstructural investigations employing diverse methodologies such as EDS, XRD, TEM, and EBSD, while mechanical properties are assessed using UPT, nanoindentation, and compression tests. Microstructural analysis reveals that Ti-42Nb alloy primarily consisted of the β phase with the presence of a small amount of nano-sized α″-martensite formed upon fast cooling. The bimodal-grained microstructure of Ti-42Nb alloy comprising epitaxially grown fine equiaxed and elongated equiaxed β-grains with an average grain size of 40 ± 28 µm exhibited a weak texture. The study shows that the obtained microstructure leads to improved mechanical properties. Young's modulus of 78.69 GPa is significantly lower than that of cp-Ti and Ti-6Al-4V alloys. The yield strength (379 MPa) and hardness (3.2 ± 0.5 GPa) also meet the criteria and closely approximate the values typical of cortical bone. UPT offers a reliable opportunity to study the nature of the ductility of the Ti-42Nb alloy by calculating its elastic constants. XPS surface analysis and electrochemical experiments demonstrate that the better corrosion resistance of the alloy in SBF is maintained by the dominant presence of TiO2 and Nb2O5. The results provide valuable insights into the development of novel low-modulus Ti-Nb alloys, which are interesting materials for additive-manufactured implants with the desired properties required for their biomedical applications.
This review summarises the most recent advances in the application of anodic aluminium oxide (AAO) membranes as templates to prepare poly(vinylidenefluoride)-(PVDF) or poly(vinylidenefluoride-co-trifluoroethylene)-based (PVDF-TrFE) piezoelectric generators, which are typically utilised in biomedical sensing and energy harvesting applications. The significant variation in the electroactive phase content in PVDF or PVDF-TrFE caused by the enhanced polarisation of AAO membranes due to nanoconfinement effect is explored. The literature survey reveals that the energy harvesting and sensing performances of various devices are significantly improved in the nano- and micropillars compared to those of flat films with the same material composition. Thus, nano- and microstructuring of the surface of biocompatible piezopolymers is promising for their applications in various devices for biosensing, strain, pressure thermal or force sensing, piezoelectric generators.
Piezoelectricity is considered to be one of the key functionalities in biomaterials to boost bone tissue regeneration, however, integrating biocompatibility, biodegradability and 3D structure with pronounced piezoresponse remains a material challenge. Herein, novel hybrid biocompatible 3D scaffolds based on biodegradable poly(3-hydroxybutyrate) (PHB) and reduced graphene oxide (rGO) flakes have been developed. Nanoscale insights revealed a more homogenous distribution and superior surface potential values of PHB fibers (33 ± 29 mV) with increasing rGO content up to 1.0 wt% (314 ± 31 mV). The maximum effective piezoresponse was detected at 0.7 wt% rGO content, demonstrating 2.5 and 1.7 times higher out-of-plane and in-plane values, respectively, than that for pure PHB fibers. The rGO addition led to enhanced zigzag chain formation between paired lamellae in PHB fibers. In contrast, a further increase in rGO content reduced the α-crystal size and prevented zigzag chain conformation. A corresponding model explaining structural and molecular changes caused by rGO addition in electrospun PHB fibers is proposed. In addition, finite element analysis revealed a negligible vertical piezoresponse compared to lateral piezoresponse in uniaxially oriented PHB fibers based on α-phase (P212121 space group). Thus, the present study demonstrates promising results for the development of biodegradable hybrid 3D scaffolds with an enhanced piezoresponse for various tissue engineering applications.
This work presents for the first time one-step ultrafast (precursor-free) synthesis of 1D MnFe2O4 (MFO) nanorods and soft magnetic colloidal nanoparticles (NPs) using microwave-assisted hydrothermal (MAH) methods, with or without citric acid (CA) as a surfactant (in situ synthesis), respectively. The mechanism of growth of spinel MFO nanostructures during the MAH synthesis was studied by varying synthesis duration (3–6 h) and temperature (180–200 °C). An increase in both the duration and temperature improved the purity of the samples, up to 97%. On the other hand, a temperature increase by 20 °C notably shortened the formation time of MFO nanorods, which have an average diameter and length of less than 20 nm and 350 nm, respectively, as observed at 200 °C after 6 h. All the fabricated MFO NPs with spherical and rod-like morphologies manifested high saturation magnetization in the range of 54–64 emu/g. The chelation of lattice metal ions by CA resulted in the formation of a stable colloid comprising 100% pure spinel MFO NPs with a size of ≤32 ± 10 nm (mean ± SD) and featuring very soft magnetic properties. This colloid was generated by the MAH synthesis at 175 °C within 30 min. Notably, an increase in synthesis duration from 30 min to 3 h diminished MFO phase purity from 100% to 52% and saturation magnetization from 43.4 ± 0.7 to 33.9 ± 2.0 emu/g for CA-functionalized MFO NPs owing to CA degradation increasing during the in situ MAH synthesis with longer duration. This study indicates good potential of ultrafast MAH synthesis for the development of 1D magnetic spinel nanostructures with controllable morphology, size, magnetic properties, and colloidal stability, thereby offering a wide range of applications within the fields of adsorption, catalysis, electronics, and biomedicine.
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Equipment
AixACCT TF Analyser 2000
The device allows you to measure dynamic and static hysteresis loops of polarization, deformation, permittivity and piezoelectric coefficient, leakage currents, polarization switching current, to investigate the effects of fatigue and aging

Research methods:
  • Dynamic and static hysteresis loops of polarization, strain, permittivity and piezoelectric coefficient
  • Pyroelectric measurements
  • Measurement of leakage currents
  • Polarization switching current measurement
  • Research on the effects of fatigue and aging

Main characteristics:
  • Precision current-to-voltage converter
  • Cells for measurement of bulk materials and thin films with temperature control
  • Internal and external amplifiers with maximum voltage up to 10 kV
  • Laser interferometric displacement sensor with 0.3 nm resolution
  • Hysteresis loop measurement frequency from 1 MHz to 1 MHz
The Team teachable
Microwave Autoclave System (Ethos up, Milestone)
Microwave acid digestion (mineralization) is today the accepted standard for sample preparation for spectral analysis methods such as atomic absorption, ICP-OES, MP-AES and ICP-MS. environmental laboratories, biological crystals in biological research, geology and metallurgy, pharmaceuticals, petrochemistry and energy, production of polymers, ceramics, nanochemistry, refractories, etc. The undisputed leader in the development and production of microwave sample preparation systems is Milestone (Italy), which founded almost all technologies and constructive solutions in this area.
The new Ethos UP and ETHOS EASY models bring a new level of convenience and productivity to sample preparation.
Spin Coating System
Large substrates are no longer a problem for centrifugation. Apex brings you the SpinNXG-P2 printer, which makes it easy to process larger media even at high speeds up to 10,000 rpm. Safety is a major concern with high angular momentum, which is why the SpinNXG-P2 comes pre-installed with a built-in lid lock to ensure safety during the plating process. It also has a field dispensing port over a photoresist cover and a large graphical LCD console for displaying a real-time rotation per minute (V/s) graph over time.
Vacuum tube furnace
BR-12NT,BR-14ST,BR-16MT series thermal vacuum tube furnace uses high-purity quartz tube or high-purity alumina tube as the furnace tube, and the operating temperature range is from 300℃ to 1600℃. Customers can choose according to actual needs. The control system of this series of equipment is world leading, with the characteristics of safety and reliability, simple operation, high temperature control precision, good heat preservation effect, high furnace temperature uniformity and atmosphere vacuuming. It is widely used for high temperature sintering processing experiments of metal materials. ,quality testing and small-scale production in colleges and VZUAH, research institutes, industrial and mining enterprises.
Tube furnaces of the BR-12NT, BR-14ST, BR-16MT series are horizontal, the heating elements are located directly on the working pipe. Operating temperature – 1200°,1400° and 1600°C.
Planetary Ball mill
Planetary ball mills find wide applications in various fields due to their ability to finely grind or mix materials to extremely small particle sizes. Here are some common applications of planetary ball mills:
  1. Material Research and Nanotechnology: Planetary ball mills are extensively used in material research and nanotechnology for synthesizing and processing advanced materials. They are employed in the production of nanoparticles, nanocomposites, and nanocrystalline materials with precise control over particle size and distribution.
  2. Ceramics and Glassware: Planetary ball mills are utilized in the preparation of ceramic powders and glassware. They can finely grind raw materials, such as oxides, carbonates, and silicates, to produce homogeneous ceramic powders or glass frits used in the fabrication of ceramics, glass, and glazes.
  3. Chemical Industry: In the chemical industry, planetary ball mills are employed for various processes, including chemical synthesis, mixing, and grinding of chemicals. They are used in the production of catalysts, pharmaceuticals, pigments, and dyes, where precise control over particle size and distribution is crucial.
  4. Pharmaceuticals: Planetary ball mills are used in pharmaceutical research and development for grinding, mixing, and homogenizing pharmaceutical compounds and excipients. They are instrumental in the preparation of drug formulations, nanomedicines, and controlled-release drug delivery systems.
  5. Metallurgy and Alloying: Planetary ball mills are employed in metallurgical research and alloying processes for synthesizing metal alloys and composites. They can finely grind metallic powders and mix them with alloying elements to produce advanced metal alloys with desired properties, such as improved strength, hardness, and corrosion resistance.
  6. Battery Materials: In the field of energy storage, planetary ball mills are used for preparing electrode materials for lithium-ion batteries and other energy storage devices. They can finely grind electrode materials, such as graphite, lithium cobalt oxide, and metal oxides, to enhance their electrochemical performance and energy storage capacity.
Overall, the versatility, precision, and efficiency of planetary ball mills make them indispensable tools in various scientific, industrial, and technological applications.

Preparation of polymer nanofibers by electrospinning (electrospinning)
Applications of Electrospun Nanofibers:
  1. Tissue Engineering and Regenerative Medicine: Electrospun nanofibers are used as scaffolds for tissue engineering applications due to their high surface area, porosity, and similarity to the extracellular matrix. They promote cell adhesion, proliferation, and differentiation.
  2. Drug Delivery Systems: Electrospun nanofibers are utilized for the controlled release of drugs and therapeutic agents. Nanofibrous drug delivery systems offer tunable drug release kinetics, enhanced bioavailability, and targeted delivery to specific sites.
  3. Filtration and Separation: Electrospun nanofiber membranes are employed in filtration and separation processes for air filtration, water treatment, and biomedical filtration applications. They exhibit high efficiency, mechanical strength, and uniform pore size distribution.
  4. Sensors and Biosensors: Electrospun nanofibers are used in the fabrication of sensors and biosensors for detecting various analytes, including gases, chemicals, and biomolecules. Functionalization of nanofibers enhances their sensitivity and selectivity for specific applications.
  5. Energy Storage and Conversion: Electrospun nanofibers are investigated for energy storage and conversion applications, such as lithium-ion batteries, supercapacitors, fuel cells, and solar cells. They serve as electrodes, separators, and electrolytes in these devices.
  6. Textiles and Apparel: Electrospun nanofibers are integrated into textiles and apparel for enhancing properties such as breathability, moisture management, antimicrobial activity, and UV protection.
Overall, electrospinning is a versatile technique for the preparation of polymer nanofibers with applications spanning across various fields including healthcare, environmental engineering, energy, and consumer products.

Magnetron installation for sputtering electrodes
A magnetron sputtering system is a type of physical vapor deposition (PVD) system used for depositing thin films of various materials onto substrates. Here's how a magnetron sputtering installation typically works for sputtering electrodes:
  1. Vacuum Chamber: The system consists of a vacuum chamber where the sputtering process takes place. The chamber is evacuated to create a low-pressure environment, typically below 10^-3 Torr, to prevent contamination and promote uniform film deposition.
  2. Target Material: The material to be sputtered, known as the target or electrode, is mounted inside the vacuum chamber. The target material can be a metal, alloy, ceramic, or semiconductor, depending on the desired film composition and properties.
  3. Substrate Holder: Substrates, such as silicon wafers, glass slides, or metal plates, are mounted on a substrate holder positioned opposite the target material. The substrates will receive the sputtered material and form the thin film.
  4. Magnetron Source: A magnetron source is used to generate a magnetic field around the target material. The magnetic field enhances the sputtering process by confining the plasma near the target surface, increasing the sputtering efficiency and improving film quality.
  5. Sputtering Gas: A sputtering gas, such as argon (Ar), is introduced into the vacuum chamber at a controlled flow rate. The sputtering gas fills the chamber and ionizes when subjected to an electric field, forming a plasma.
  6. DC or RF Power Supply: A DC or radio frequency (RF) power supply is connected to the target material to apply a negative voltage. This voltage accelerates the positively charged ions in the plasma towards the target surface, causing them to collide with the target atoms and dislodging them through a process called sputtering.
  7. Sputtered Material Deposition: The sputtered target material atoms are ejected from the target surface and travel in straight lines, depositing onto the substrates positioned opposite the target. The substrate holder can be rotated or tilted to ensure uniform film deposition across the substrate surface.
  8. Film Thickness Control: The thickness of the deposited thin film can be controlled by adjusting parameters such as sputtering time, sputtering power, target-to-substrate distance, and sputtering gas pressure.
  9. Film Characterization: After deposition, the thin film's properties, such as thickness, composition, morphology, and optical or electrical properties, can be characterized using techniques such as scanning electron microscopy (SEM), atomic force microscopy (AFM), X-ray diffraction (XRD), and spectroscopic ellipsometry.
Overall, magnetron sputtering installations offer a versatile and efficient method for depositing thin films with precise control over film properties, making them widely used in various industries including semiconductor manufacturing, optical coatings, and surface engineering.

RF Magnetron Sputtering Installation
An RF (Radio Frequency) magnetron sputtering installation is a type of physical vapor deposition (PVD) system used for depositing thin films of various materials onto substrates. Here's an overview of how an RF magnetron sputtering installation typically works:
  1. Vacuum Chamber: The system consists of a vacuum chamber where the sputtering process takes place. The chamber is evacuated to create a low-pressure environment, typically below 10^-3 Torr, to prevent contamination and promote uniform film deposition.
  2. Target Material: The material to be sputtered, known as the target, is mounted inside the vacuum chamber. The target material can be a metal, alloy, ceramic, or semiconductor, depending on the desired film composition and properties.
  3. Substrate Holder: Substrates, such as silicon wafers, glass slides, or metal plates, are mounted on a substrate holder positioned opposite the target material. The substrates will receive the sputtered material and form the thin film.
  4. RF Power Supply: An RF power supply is used to generate an oscillating electric field between the target and the substrate. The RF power supply applies a high-frequency alternating voltage (typically in the MHz range) to the target material, creating a plasma discharge.
  5. Sputtering Gas: A sputtering gas, such as argon (Ar), is introduced into the vacuum chamber at a controlled flow rate. The sputtering gas fills the chamber and ionizes when subjected to the RF electric field, forming a plasma.
  6. Magnetron Source: A magnetron source is used to generate a magnetic field around the target material. The magnetic field enhances the sputtering process by confining the plasma near the target surface, increasing the sputtering efficiency and improving film quality.
  7. Sputtering Process: The RF power supply creates an oscillating electric field that accelerates the positively charged ions in the plasma towards the target surface. These ions collide with the target atoms, dislodging them from the target surface through a process called sputtering.
  8. Deposition onto Substrates: The sputtered target material atoms are ejected from the target surface and travel in straight lines, depositing onto the substrates positioned opposite the target. The substrate holder can be rotated or tilted to ensure uniform film deposition across the substrate surface.
  9. Film Thickness Control: The thickness of the deposited thin film can be controlled by adjusting parameters such as sputtering time, RF power, target-to-substrate distance, and sputtering gas pressure.
  10. Film Characterization: After deposition, the thin film's properties, such as thickness, composition, morphology, and optical or electrical properties, can be characterized using techniques such as scanning electron microscopy (SEM), atomic force microscopy (AFM), X-ray diffraction (XRD), and spectroscopic ellipsometry.
Overall, RF magnetron sputtering installations offer a versatile and efficient method for depositing thin films with precise control over film properties, making them widely used in various industries including semiconductor manufacturing, optical coatings, and surface engineering.

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